Ferrotec Corporation Ferrotec Corporation   |   JAPANESE   |   sitemap
 
     
 
Alimina Ceramics title pics

Alumina Ceramics　Al2O3
Alumina ceramics are widely chosen in engineering ceramics. The ceramics exhibit high electrical insulation, abrasion and corrosion resistance as well as good cost effectiveness. Ferrotec Ceramics provides a wide selection of alumina materials such as over 99.99% of high purity grade alumina and high plasma resistance alumina etc.

Applications
  • Chamber Parts in Semiconductor Equipment
  • Wafer Transfer Parts
    		•
  • FPD Manufacturing Equipment Parts
  • Heat Resistant and Electrical Insulation Parts
    		•
    Almina Ceramics Products Photo Almina Ceramics Products Photo

    Properties

    General Properites
    Material Code Characteristics Main Component Purity
    (wt%)    		 Color Density(g/cm3) Water Absorption(%)
    AS999 High Purity 99.99 White 3.95 0
    AG999 Plasma-resistant 99.9 Whitish-yellow 3.93 0
    AM997 Gerenal grade 99.7 Whitish-yellow 3.93 0

    Mechanical Properties
    Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
    390 380 18
    390 380 17
    390 375 18

    Thermal Properties
    Max.Operating Temperature（℃） Coefficient of Thermal Expansion（1/℃　×10-6） Coefficient of Thermal Conductivity（W/m･K） Thermal Shock Resistance ΔT（℃）
    RT～500℃ RT～800℃
    1600 7.0 7.7 33 200
    1600 7.4 8.1 30 -
    1600 7.0 7.6 33 200

    Electrical Properties
    Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
    (×10-4）     		Q Factor
    （×104）     		Dielectric Breakdown Voltage
    （kV/mm）
    25℃ 300℃ 500℃ 800℃ 10GHz
    1015 1012 109 107 9.9 0.5 2 18
    1015 - - - 9.7 6 0.2 17
    1016 1013 1010 109 9.7 1 1 18
     
    PAGETOP