Fine Ceramics Components Fine Ceramics Components

Almina Ceramics

Alumina Ceramics Al2O3

Alumina ceramics are widely chosen in engineering ceramics. The ceramics exhibit high electrical insulation, abrasion and corrosion resistance as well as good cost effectiveness. Ferrotec Ceramics provides a wide selection of alumina materials such as over 99.99% of high purity grade alumina and high plasma resistance alumina etc.

Applications

  • Chamber Parts in Semiconductor Equipment
  • Wafer Transfer Parts
  • FPD Manufacturing Equipment Parts
  • Heat Resistant and Electrical Insulation Parts
Almina Ceramics Products Photo Almina Ceramics Products Photo

Properties

General Properites

Material Code Characteristics Main Component Purity
(wt%)
Color Density(g/cm3) Water Absorption(%)
AS999 High Purity 99.99 White 3.95 0
AT999 Heat resistant 99.9 Whitish-yellow 3.92 0
AM997 Plasma-resistant
Gerenal grade
99.7 Whitish-yellow 3.93 0
AM997QⅡ Low dielectric Loss 99.7 Whitish-yellow 3.93 0
ACM995 Machine parts 99.5 Whitish-yellow 3.93 0
ACM96 Machine parts 96 White 3.74 0

Mechanical Properties

Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
390 380 18
400 385 16
390 375 18
390 385 17
370 370 16
350 320 14

Thermal Properties

Max.Operating Temperature(℃) Coefficient of Thermal Expansion(1/℃ ×10-6 Coefficient of Thermal Conductivity(W/m・K) Thermal Shock Resistance ΔT(℃)
RT~500℃ RT~800℃
1600 7.0 7.7 33 200
1600 7.9 - 34 200
1600 7.0 7.6 33 200
1600 7.0 - 33 200
1600 7.2 - 32 250
- 7.2 - 24 200

Electrical Properties

Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
(×10-4
Q Factor
(×104
Dielectric Breakdown Voltage
(kV/mm)
25℃ 300℃ 500℃ 800℃ 10GHz
1015 1012 109 107 9.9 0.5 2 18
1015 1014 1011 106 9.8 4 0.25 17
1016 1013 1010 109 9.7 1 1 18
1015 1014 1012 105 9.7 0.15 6.7 18
1014 1014 1010 106 9.9 10 0.1 15
1015 109 107 105 9.4 38 0.03 14
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