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Aluminium Nitride Ceramics

Aluminium Nitride Ceramics AlN

The highlight of Aluminium nitride ceramics' property is high heat conductance. Also the material has other unique properties which are high florin plasma resistance and similar expantion coefficient with Silicon (Si). With these benefits, the Aluminium Nitride ceramics is used in many different applications which are required high heat conductivity and/or high plasma resistance such as the parts used in semiconductor equipments We provide both high heat conductance grade and high purity grade of the aluminium nitride ceramics.

Applications

  • Chamber parts for Semiconductor Process Equipment
  • Heat Radiation Substrate
Aluminium Nitride Ceramics Products Photo

Properties

General Properties

Material Code Characteristics Main Component Purity(wt%) Color Density(g/cm3) Water Absorption(%)
ALN99 High purity 99 Light gray 3.24 0
ALN94 HighThermal Conductivity 94 Light gray 3.31 0

Mechanical Properties

Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
295 320 11
345 320 11

Thermal Properties

Max.Operating Temperature(℃) Coefficient of Thermal Expansion(1/℃ ×10-6 Coefficient of Thermal Conductivity(W/m・K) Thermal Shock ResistanceΔT(℃)
RT~500℃ RT~800℃
1000 4.4 - 80 -
1000 4.4 - 150 400

Electrical Properties

Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
(×10-4
Q Factor
(×104
Dielectric Breakdown Voltage(KV/mm)
25℃ 300℃ 500℃ 800℃ 10GHz
1014 108 107 105 8.5 30 0.03 -
1014 1010 107 105 8.5 30 0.03 15
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