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Low CTE Ceramics

Low CTE Ceramics

Low CTE Ceramics exhibit Zero expansion at room temperature, and one of the most light engineering ceramics. The Low CTE ceramics are widely used in semiconductor equipment and high precision instruments with its unique property.

Applications

  • Semiconductor Process Equipment Parts
  • Precision Machinery Parts
Low CTE Ceramics Products Photo

Properties

General Properties

Material Code Main Component Purity(wt%) Color Density(g/cm3) Wanter Absorption(%)
LE101 - Gray 2.55 0

Mechanical Properties

Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
200 140 -

Thermal Properties

Max.Operating Temperature(℃) Coefficient of Thermal Expansion(1/℃ ×10-6 Coefficient of Thermal Conductivity(W/m・K) Thremal Shock Resistance ΔT(℃)
RT~500℃ RT~800℃
- < 0.5 2.0 - -

Electrical Properties

Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
(×10-4
Q Factor
(×1014
Dielectric Breakdown Voltage
(kV/mm)
25℃ 300℃ 500℃ 800℃ 10GHz
1014 1012 1010 106 4.9 5 0.2 23
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