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Low CTE Ceramics Products Title

Low CTE Ceramics
Low CTE Ceramics exhibit Zero expansion at room temperature, and one of the most light engineering ceramics. The Low CTE ceramics are widely used in semiconductor equipment and high precision instruments with its unique property.

Application
  • Semiconductor Process Equipment Parts
    		•
  • Precision Machinery Parts
    		•
    Low CTE Ceramics Products Photo

    Properties

    General Properties
    Main Component Purity(wt%) Color Density(g/cm3) Wanter Absorption(%)
    90 Gray 3.2 0

    Mechanicl Properties
    Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
    880 290 12

    Thermal Properties
    Max.Operating Temperature（℃） Coefficient of Thermal Expansion（1/℃　×10-6） Coefficient of Thermal Conductivity（W/m･K） Thremal Shock Resistance ΔT（℃）
    RT～500℃ RT～800℃
    1300 2.4 2.9 27 800

    Electrical Properties
    Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
    (×10-4）     		Q Factor
    （×1014）     		Dielectric Breakdown Voltage
    （kV/mm）
    25℃ 300℃ 500℃ 800℃ 10GHz
    1015 - - - 8.0 14 0.7 15
     
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