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SiAlON Ceramics Products Title

SiAlON Ceramics
SiAlON Ceramics are the solid solute material of Aluminium (Al) and Oxygen (O) into Silicon Nitride, which have the low heat expansion and high strength properties, therefore can be used in high temperature and high heat shock condition. The application of the SiAlON ceramics is semiconductor equipment parts as well as general industrial machinery parts as high temperature resistance structural materials

Application
  • Semiconductor Equipment Parts
  • General Industry Machinery Parts
    		•
  • Heat Resistant Parts
  • Abrasion Resistant Parts
    		•
    SiAlON Ceramics Products Photo

    Proterties

    General Properties
    Main Component Purity(wt%) Color Density(g/cm3) Water Absorption(%)
    90 Gray 3.2 0

    Mechanical Properties
    Bending Strength(MPa) Young's Modulus(GPa) Vickers Hardness(GPa)
    880 290 12

    Thermal Properties
    Max.Operating Temperature（℃） Coefficient of Thermal Expansion（1/℃　×10-6） oefficient of Thermal Conductivity（W/m･K） Thermal Shock Resistance ΔT（℃）
    RT～500℃ RT～800℃
    1300 2.4 2.9 27 800

    Electrical Properties
    Volume Resistivity(Ω・cm) Dielectric Constant Dielectric Loss
    (×10-4）     		Q Factor
    （×1014）     		Dielectric Breakdown Voltage
    （kV/mm）
    25℃ 300℃ 500℃ 800℃ 10GHz
    1015 - - - 8.0 14 0.7 15
     
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