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Silicon Nitride Ceramics Products Pics

Silicon Nitride Si3N4

Silicon Nitride Ceramics are the high hardness and high toughness material and has high temperature resistance and high heat shock resistance properties, which can be used in high load and high temperature environments. Our Silicon Nitride Ceramics are widely used in Semiconductor equipments and general industry machineries.

Application

  • Semiconductor Process Equipment
  • General Industrial Machinery
  • Heat resistance parts
  • Silicon Nitride Ceramics Products Photo

    Properties

    General Properties

    Main Component Purity(wt%) Color Density(g/cm3) Water Absorption(%)
    90 Gray 3.25 0

    Mechanical Properties

    Bending Strength(MPa) Young's Modulus(GPa) Vickers Jardness(GPa)
    785 285 16

    Thermal Properties

    Max.Operating Temperature(℃) Coefficient of Thermal Expansion(1/℃ ×10-6 Coefficient of Thermal Conductivity(W/m・K) Thermal Shock Resistance ΔT(℃)
    RT~500℃ RT~800℃
    1200 3.5 4.2 13 650

    Electrical Properties

    Volume Resistivity Dielectric Constant Dielectric Constant
    (×10-4
    Q Factor
    (×104
    Dielectric Breakdown Voltage
    (kV/mm)
    25℃ 300℃ 500℃ 800℃ 10GHz
    1016 1014 1011 107 8.3 25 0.04 14
     
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