株式会社フェローテックセラミックス | Products | Fine Ceramics

Material					Fine Ceramics										Reference
					Alumina Al2O3			Silicon nitride Si₃N₄	SiAlON	Silicon carbide SiC	Aluminum nitride AlN		Zirconia ZrO₂	Low thermal- expansion ceramics	Reference
					AS999	AG999	AM997	SN605	SA201	SC902	ALN99	ALN94	Z403	LE101	Quartz	Stainless Steel
General Properties	Main Component Purity		wt％		99.99	99.9	99.7	90	90	97	99	94	94	－	99.99	－
	Color				White	Whitish-yellow	Whitish-yellow	Gray	Gray	Black	Light gray	Light gray	Whitish-yellow	Gray	Transparent	－
	Density		g/cm³		3.95	3.95	3.93	3.25	3.20	3.10	3.24	3.31	5.98	2.5	2.20	7.93
	Water Absorption		％		0	0	0	0	0	0	0	0	0	0	0	0
Mechanical Properties	Bending Strength		MPa		390	390	390	725	880	400	295	345	880	200	70	－
	Young's Modulus		GPa		380	380	375	285	290	400	320	320	245	140	71	193
	Vickers Hardness		GPa		18	17	18	16	12	20	11	11	16	－	9	2
Thermal Properties	Max.Operating Temperature		℃		1600	1600	1600	1200	1300	1600	1000	1000	－	－	－	－
	Coefficient of Thermal Expansion	RT～500℃	1/℃ (×10^-6)		7.0	7.4	7.0	3.5	2.4	3.9	4.4	4.4	8.9	<0.5	0.64	18.7
	Coefficient of Thermal Expansion	RT～800℃	1/℃ (×10^-6)		7.7	8.1	7.6	4.2	2.9	3.9	－	－	10.4	2.0	－	－
	Coefficient of Thermal Conductivity		W/m・k		33	30	33	13	27	130	80	150	3	－	1.1	16.3
	Thermal Shock Resistance		△T（℃）		200	－	200	700	800	300	－	－	280	－	－	－
Electrical Properties	Volume Resistivity	25℃	Ω･cm		10¹⁵	10¹⁵	10¹⁶	10¹⁶	10¹⁵	3×10⁶	10¹⁴	10¹⁴	－	10¹⁴	＞10¹⁵	－
		300℃			10¹²	10¹⁴	10¹³	10¹⁴	10¹³	－	10⁸	10¹⁰	－	10¹²	－	－
		500℃			10⁹	10¹³	10¹⁰	10¹¹	10¹¹	－	10⁷	10⁷	－	10¹⁰	－	－
		800℃			10⁷	10⁸	10⁹	10⁷	10⁷	－	10⁵	10⁵	－	10⁶	－	－
	Dielectric Constant		10GHz		9.9	9.7	9.7	8.3	8.0	－	8.5	8.5	－	－	－	－
	Dielectric Loss			×10^-4	0.5	6	1	25	14	－	30	30	－	－	－	－
	Q Factor	1/tanδ		×10⁴	2	0.2	1	0.04	0.7	－	0.03	0.03	－	－	－	－
	Dielectric Breakdown Voltage		KV/mm		18	17	18	14	15	－	－	－	－	23	－	－
Main Characteristics					Chemical- resistant Microwave- transmissive	Heat-resistant Chemical- resistant	Heat-resistant Chemical-resistant Microwave- transmissive	High-strength Wear-resistant Thermal- shock-resistant	High-strength Wear-resistant Thermal- shock-resistant	Heat-resistant Chemical-resistant Wear-resistant	High thermal conductivity Microwave-transmissive		High strength High toughness Wear-resistant	Low thermal expansion Poreless	High purity Heat-resistant Chemical- resistant
Recommended Applications					Microwave induction plates Chanber Parts Insulating parts	Plasma-resistant parts Insulating parts	Chanber Parts Insulating parts Machine parts Microwave induction plates	Machine parts Sliding parts Heat-resistant parts	Machine parts Sliding parts Heat-resistant parts	Machine parts Sliding parts Heat-resistant parts	Microwave induction plates Insulating parts		Machine parts Sliding parts	Machine parts	Semiconductor manufacturing jigs/parts Heat-resistant parts